Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Chiori Kaneko"'
Publikováno v:
SHINKU. 38:859-864
In order to understand the discharge mechanism of crossed electrical and magnetic field discharge, a fine probe is inserted into the planar magnetron discharge, and the potential distribution and its characteristics are measured. In the positive spac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5da1fdc07d198af30ae0ac7fa081289e
https://doi.org/10.3131/jvsj.38.859
https://doi.org/10.3131/jvsj.38.859
