Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Ching-Tsen Chang"'
Publikováno v:
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
This study designs and implements a silicon-based 3-axis Lorentz-force resonant magnetic sensor with single proof-mass using TSMC bulk MEMS above standard CMOS process [1]. The device is a 3-axis resonant-type sensor driven by single current loop. Wh
Publikováno v:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
This paper proposes a nanostructure-enhanced fiber-optic interferometry (NSFOI) biosensor, combining the abilities of high sensitivity, real-time monitoring and in-situ measurement for label-free immunological detection, by employing high-aspect-rati
Publikováno v:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems; 2009, p296-299, 4p