Zobrazeno 1 - 10
of 208
pro vyhledávání: '"Ching-Liang Dai"'
Publikováno v:
Micromachines, Vol 14, Iss 5, p 1038 (2023)
The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transisto
Externí odkaz:
https://doaj.org/article/7fc19781006c4215911930ba8ffe9287
Publikováno v:
Sensors, Vol 23, Iss 6, p 3166 (2023)
In this work, enzymatic doped/undoped poly-silicon nanowire sensors with different lengths were fabricated using a top-down technique to measure glucose concentration. The sensitivity and resolution of these sensors correlate well with the dopant pro
Externí odkaz:
https://doaj.org/article/9bf9b7502b78425d84f69f7cd31a7a9f
Publikováno v:
Micromachines, Vol 13, Iss 8, p 1258 (2022)
This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series o
Externí odkaz:
https://doaj.org/article/a25bb43dc29f4ee490c18a28297052ff
Autor:
Yu-Hsin Yen, Chao-Shin Hsu, Zheng-Yan Lei, Hsin-Jou Wang, Ching-Yuan Su, Ching-Liang Dai, Yao-Chuan Tsai
Publikováno v:
Micromachines, Vol 13, Iss 8, p 1220 (2022)
In intelligent manufacturing and robotic technology, various sensors must be integrated with equipment. In addition to traditional sensors, stretchable sensors are particularly attractive for applications in robotics and wearable devices. In this stu
Externí odkaz:
https://doaj.org/article/b4a4b2d9668448409740cc04a7369080
Publikováno v:
Sensors, Vol 21, Iss 21, p 6953 (2021)
A three-axis micro magnetic sensor (MS) is developed based on the standard 180 nm complementary metal oxide semiconductor (CMOS) technology. The MS designs two magnetic sensing elements (MSEs), which consists of an x/y-MSE and an z-MSE, to reduce cro
Externí odkaz:
https://doaj.org/article/b1edba1b0a1e439a8a7ab9f27f5e7393
Publikováno v:
Sensors, Vol 21, Iss 4, p 1396 (2021)
A radio frequency microelectromechanical system switch (MSS) manufactured by the complementary metal oxide semiconductor (CMOS) process is presented. The MSS is a capacitive shunt type. Structure for the MSS consists of coplanar waveguide (CPW) lines
Externí odkaz:
https://doaj.org/article/65231430fc5a4781b604aa1f7765d0e5
Publikováno v:
Micromachines, Vol 6, Iss 11, Pp 1645-1654 (2015)
The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS) technology. The structure of the micromachined swi
Externí odkaz:
https://doaj.org/article/693b5fb9a83c491ba4041beac9afd842
Publikováno v:
Sensors, Vol 20, Iss 17, p 4731 (2020)
The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a
Externí odkaz:
https://doaj.org/article/be9807d3862b4c9f81f31e9767828b04
Publikováno v:
Micromachines, Vol 11, Iss 1, p 92 (2020)
This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)−microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sens
Externí odkaz:
https://doaj.org/article/8635920fd9604c4cb959b7d1202dd97f
Publikováno v:
Micromachines, Vol 6, Iss 10, Pp 1560-1568 (2015)
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eigh
Externí odkaz:
https://doaj.org/article/3fe98e16483448cba8450abe97ea498f