Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ching Hwa Weng"'
Autor:
J.H. Liao, Jian She Tang, John T.C. Lee, Joe Lai, Wei Lu, Cheng Ming Weng, Ren Huang, Ching Hwa Weng, Han Wen Chen, Mei Qi Wang, Miao Chun Lin
Publikováno v:
Solid State Phenomena. 134:359-362
As 65nm technology in mass production and 45nm technology under development, post etch ash and cleaning faces new challenges with far more stringent requirements on surface cleanliness and materials loss. The introduction and integration of new mater
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c17d19348788916beb6e2bf9a33328cb
https://doi.org/10.4028/www.scientific.net/ssp.134.359
https://doi.org/10.4028/www.scientific.net/ssp.134.359
Autor:
Miao Chun Lin, Mei Qi Wang, Joe Lai, Ren Huang, Cheng Ming Weng, J.H. Liao, Jian She Tang, Ching Hwa Weng, Wei Lu, Han Wen Chen, John T.C. Lee
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad74d4148a4b37b67b0643cd94497d01
https://doi.org/10.4028/3-908451-46-9.359
https://doi.org/10.4028/3-908451-46-9.359
