Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Chil-Keun Park"'
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
This paper reports a high-sensitive robust humidity sensor using a pair of thermally isolated membranes on which includes meander shaped metal resistive elements are formed. The sensing mechanism of the humidity sensor is based on the difference of t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e57bd4c30407fd496fef5218e0d8c6a
https://doi.org/10.1109/memsys.2001.906602
https://doi.org/10.1109/memsys.2001.906602
Autor:
Hyun-Pil Noh, Young-Sam Jeon, Ki-Chang Song, Seung-Yoon Lee, Jung-Ho Kang, Don-Hee Lee, Taeho Lee, Jinho Ahn, Chil-Keun Park
Publikováno v:
Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e8cebe43c650fb744e5076e517e4757
https://doi.org/10.1109/imnc.1998.730001
https://doi.org/10.1109/imnc.1998.730001
Autor:
D.H. Lee, Hyeon Gyu Lee, Jinho Ahn, Chil-Keun Park, Sangsul Lee, Ki Chang Song, C.Y. Jeong, Young-Sam Jeon
Publikováno v:
Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::578614749b096e2cd3375714e08e3db7
https://doi.org/10.1109/imnc.1998.730003
https://doi.org/10.1109/imnc.1998.730003
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090); 2001, p558-561, 4p
Autor:
Young–Sam Jeon, Chil Keun Park, Chang Young Jeong, Don-Hee Lee, Jinho Ahn, Ki Chang Song, Taeho Lee
Publikováno v:
Japanese Journal of Applied Physics. 36:7570
In order to obtain the low-stress absorber for the X-ray mask, we have investigated the internal stress and the microstructures of WN x bilayer films with the structure of amorphous/crystalline phases. WN x film goes through a transition from an amor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b38bd4c95fab298c540b16683ed01d5f
https://doi.org/10.1143/jjap.36.7570
https://doi.org/10.1143/jjap.36.7570
Autor:
Ki-Chang Song, Don-Hee Lee, Young-Sam Jeon, Chil-Keun Park, Hyun-Pil Noh, Seung-Yoon Lee, Tae-Ho Lee, Jung-Ho Kang, Jinho Ahn
Publikováno v:
Digest of Papers Microprocesses & Nanotechnology'98 198 International Microprocesses & Nanotechnology Conference (Cat No98EX135); 1998, p117-118, 2p
Conference
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