Zobrazeno 1 - 2
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pro vyhledávání: '"Chihiro Shimohira"'
Development of MEMS Flow and Pressure Sensor Device for Detection of Extravasation at an Early Stage
Autor:
Yoshihiro Hasegawa, Chihiro Shimohira, Miyoko Matsushima, Tomoshi Sugiyama, Tsutomu Kawabe, Mitsuhiro Shikida
Publikováno v:
IEEJ Transactions on Electrical and Electronic Engineering. 18:139-146
Autor:
Chihiro Shimohira, Kazuhiro Taniguchi, Yoshihiro Hasegawa, Mitsuhiro Shikida, Tsutomu Kawabe, Miyoko Matsushima
Publikováno v:
Microsystem Technologies. 26:3677-3683
In this work, we developed a MEMS flow sensor for application to a drip infusion system. The MEMS sensor is composed of a silicone rubber layer, a film sensor with a flow rate measurement element consisting of a metal heater and thermistors formed on