Zobrazeno 1 - 1
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pro vyhledávání: '"Chi-Jie Xiao"'
Autor:
Lili Zhang, Wanjin Xu, Tianchao Xu, Renchuan He, Rong Huang, Chuanqin Liu, Yanping Li, An Dingsun, Chi-Jie Xiao, Guogang Qin
Publikováno v:
Physica Scripta. 98:055929
This work made an in-depth study on the transport of B, Al and Ag ions in an inductively coupled plasma-Si system. The plasma-stimulated impurity ion transport is demonstrated to be described by an implantation-diffusion two-step process rather than
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b71c22bf8420146b2ab1bc3c7fc7ae0
https://doi.org/10.1088/1402-4896/accb1c
https://doi.org/10.1088/1402-4896/accb1c
