Zobrazeno 1 - 1
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pro vyhledávání: '"Chi-Jay Huang"'
Publikováno v:
Automatica. 36:705-715
Rapid thermal processing (RTP) offers a growing potential in integrated circuit manufacturing as the feature sizes in ULSI move further down into the subhalf micrometer technology. The main problem of RTP control lies in temperature uniformity. In th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::443e82860be4271d83b1ac37d342295f
https://doi.org/10.1016/s0005-1098(99)00197-1
https://doi.org/10.1016/s0005-1098(99)00197-1
