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Annealing Temperature Dependence of ZTO Thin Film Properties and Its Application on Thin Film Transistors by Inkjet Printing

Autor: Ho Young Jun, Si Ok Ryu, Sang Ouk Ryu, Cheul Ho Ha

Publikováno v: Journal of Electronic Materials. 49:2003-2007

In this study, inkjet-printed zinc tin oxide:Cl (ZTO:Cl) thin films were analyzed using x-ray diffraction, x-ray photoelectron spectroscopy (XPS) and all the films were annealed at temperatures ranging from 100°C to 600°C. XPS analysis showed that

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::df172339a5634a1ccf6260518ee0d4c2
https://doi.org/10.1007/s11664-019-07871-7

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