Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Cheng-Yang Lien"'
Autor:
Ting Kuei Lien, Kohei Ogiwara, Kuo Feng Chiu, Kuan Chen Chen, Yoshinobu Kawai, Kiichiro Uchino, Cheng Yang Lien, Masaaki Tanaka, Yu Jer Tsai, Fumihiko Matsunaga, Chia-Fu Chen
Publikováno v:
Plasma Processes and Polymers. 13:584-587
A capacitively coupled VHF H2 plasma (60 MHz) was produced by a narrow gap discharge at high pressures, and spatial distributions of the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d78ce22da026cbb405c691d90c0f3577
https://doi.org/10.1002/ppap.201500183
https://doi.org/10.1002/ppap.201500183
Autor:
Kuo-Feng Chiu, Jen-Bin Shi, Shui-Yang Lien, Cheng-Yang Lien, Jui-Hao Wang, Chia-Fu Chen, Ching-Lung Yang, Yoshinobu Kawai, Yu-Jer Tsai, Ting-Kuei Lien
Publikováno v:
Vacuum. 121:289-293
We produced a VHF H 2 plasma (frequency, 60 MHz) by a narrow-gap discharge and examined the plasma parameters as a function of pressure and power, where two parallel plate electrodes (400 × 300 mm 2 ) were used. The plasma density reached a peak at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a426febee5e48712c3266a62a68d43a6
https://doi.org/10.1016/j.vacuum.2015.02.037
https://doi.org/10.1016/j.vacuum.2015.02.037
Autor:
Yoshinobu Kawai, Yu Jer Tsai, Kuo Feng Chiu, Kiichiro Uchino, Ting Kuei Lien, Kuan Chen Chen, Chia-Fu Chen, Cheng Yang Lien, Kohei Ogiwara
Publikováno v:
Japanese Journal of Applied Physics. 55:06HA02
A VHF H2 plasma was produced by a narrow-gap discharge at high pressures, and the plasma parameters were examined with the Langmuir probe. A bi-Maxwellian electron distribution was observed near the discharge electrode at a discharge gap of 10 mm, wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1a717c61d0a8d906095442f885378d51
https://doi.org/10.7567/jjap.55.06ha02
https://doi.org/10.7567/jjap.55.06ha02
Autor:
Kohei Ogiwara, Cheng Yang Lien, Chia-Fu Chen, Kiichiro Uchino, Yoshinobu Kawai, Yu Jer Tsai, Jen-Bin Shi, Ting Kuei Lien, Kuan Chen Chen, Kuo Feng Chiu
Publikováno v:
Japanese Journal of Applied Physics. 55:01AH01
A capacitively coupled VHF H2 plasma was produced with a conventional parallel plate electrode of 400 × 300 mm2. Axial distributions of the plasma parameters were examined using a movable Langmuir probe. The electron density had a hill-like profile
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::107bf9a3cccae3642bdaf306ed1986a3
https://doi.org/10.7567/jjap.55.01ah01
https://doi.org/10.7567/jjap.55.01ah01
Autor:
Kuo-Feng Chiu, Jui-Hao Wang, Yoshinobu Kawai, Chia-Fu Chen, Yu-Jer Tsai, Cheng-Yang Lien, Sy-Ruen Huang, Ting-Kuei Lien, Ching-Lung Yang, Jen-Bin Shi
Publikováno v:
Japanese Journal of Applied Physics. 54:096101
A capacitively coupled VHF H2 plasma (60 MHz) was produced at high pressures, and plasma parameters were examined as a function of pressure and power at different discharge gaps (10, 15, and 20 mm). Here, a balanced power feeding method was adopted t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b07cd46ae2d4e90a089d062dc91da93
https://doi.org/10.7567/jjap.54.096101
https://doi.org/10.7567/jjap.54.096101
Autor:
Kuan-Chen Chen, Kuo-Feng Chiu, Chia-Fu Chen, Cheng-Yang Lien, Yu-Jer Tsai, Ting-Kuei Lien, Kohei Ogiwara, Kiichiro Uchino, Yoshinobu Kawai
Publikováno v:
Japanese Journal of Applied Physics; Jun2016, Vol. 55 Issue 6S2, p1-1, 1p
Autor:
Cheng-Yang Lien, Chia-Fu Chen, Ching-Lung Yang, Yoshinobu Kawai, Kuo-Feng Chiu, Jen-Bin Shi, Sy-Ruen Huang, Jui-Hao Wang, Yu-Jer Tsai, Ting-Kuei Lien
Publikováno v:
Japanese Journal of Applied Physics; Sep2015, Vol. 54 Issue 9, p1-1, 1p