Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Cheng-Chia Kuo"'
Publikováno v:
2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits.
This investigation considers in detail a defect called "silicon substrate damaged defects" and also introduces these defects' forming mechanisms and their root causes. These defects are likely to become increasing important in the future of deep-sub
Publikováno v:
2007 14th International Symposium on the Physical & Failure Analysis of Integrated Circuits; 2007, p280-283, 4p