MEMS technology development and manufacturing in a CMOS foundry.

Autor: Liu, C.M., Chou, B.C.S., Tsai, R.C.-F., Shen, N.Y.M., Chen, B.S.F., Cheng, E.C.W., Hsiao Chin Tuan, Kalnitsky, A., Cheng, S., Chung-Hsien Lin, Tien-Kan Chung, Kuei-Sung Chang, Yi-Shao Liu

Publikováno v: 2011 16th International Solid-State Sensors, Actuators & Microsystems Conference (TRANSDUCERS); 2011, p807-810, 4p