Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Chegwidden, Scott"'
Autor:
Cheng, Wen-Hao, Farnsworth, Jeff, Kwok, Wai, Jamieson, Andrew, Wilcox, Nathan, Vernon, Matt, Yung, Karmen, Liu, Yi-Ping, Kim, Jun, Frendberg, Eric, Chegwidden, Scott, Schenker, Richard, Borodovsky, Yan
Publikováno v:
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69241G-69241G-10, 10p
Publikováno v:
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59921A-59921A-6, 6p
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p1281-1286, 6p
Impact of the loading effect on CD control in plasma etching of Cr photomasks using ZEP 7000 resist.
Autor:
Chen, Frederick T., Tsai, Wilman, Chegwidden, Scott, Yu, S., Kamna, Marilyn, Farnsworth, Jeff N., Coleman, Thomas P.
Publikováno v:
Proceedings of SPIE; Nov1998 Part 2, Issue 1, p429-437, 9p
Autor:
Tsai, Wilman, Chen, Frederick T., Kamna, Marilyn, Chegwidden, Scott, Labovitz, Steven M., Farnsworth, Jeff N., Dao, Giang T.
Publikováno v:
Proceedings of SPIE; Nov1998, Issue 1, p149-162, 14p
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 4, p2376-2380, 5p