Zobrazeno 1 - 10
of 132
pro vyhledávání: '"Chee Yee Kwok"'
Publikováno v:
Microsystems & Nanoengineering, Vol 10, Iss 1, Pp 1-13 (2024)
Abstract Low-thermal-budget, electrically active, and thick polysilicon films are necessary for building a microelectromechanical system (MEMS) on top of a complementary metal oxide semiconductor (CMOS). However, the formation of these polysilicon fi
Externí odkaz:
https://doaj.org/article/b345cf204b56493b9914bf343000dde6
Autor:
Debarun Sengupta, Ssu-Han Chen, Aron Michael, Chee Yee Kwok, Sean Lim, Yutao Pei, Ajay Giri Prakash Kottapalli
Publikováno v:
npj Flexible Electronics, Vol 4, Iss 1, Pp 1-11 (2020)
Abstract This work demonstrates the application of electrospun single and bundled carbon nanofibers (CNFs) as piezoresistive sensing elements in flexible and ultralightweight sensors. Material, electrical, and nanomechanical characterizations were co
Externí odkaz:
https://doaj.org/article/51d7dce428d8425ea132826f3f138be3
Publikováno v:
Proceedings, Vol 2, Iss 13, p 857 (2018)
This work reports the process optimization of various electrospinning parameters to fabricate polyvinylidene fluoride based piezoelectric flexible nanofiber webs for passive sensing and energy harvesting applications. Process parameters like electros
Externí odkaz:
https://doaj.org/article/dfc5ca2afb704c9496766cde9cdd7f5c
Publikováno v:
Proceedings, Vol 1, Iss 4, p 354 (2017)
This paper reports on polysilicon piezo-resistors that are fabricated at a low thermal budget using aluminium-induced-crystallization (AIC) of ultra-high-vacuum e-beam evaporated silicon films. By in-situ phosphorus doping of precursor amorphous sili
Externí odkaz:
https://doaj.org/article/3ac48b8e67164b47a76ed14286c7ce8e
Publikováno v:
Journal of Microelectromechanical Systems. 29:1418-1420
This letter presents experimental results showing significant enhancement in the dynamic performance of a novel piezoelectric micro-lens actuator using a robust feedback resonant controller. The design of the feedback controller is based on experimen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::345c81275b89ade14edbd5cc8b1f6a20
https://doi.org/10.1109/jmems.2020.3032670
https://doi.org/10.1109/jmems.2020.3032670
Publikováno v:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).
This paper presents the development of a dynamic analytical model for piezoelectrically driven micro-lens actuator for micro-optics applications. The model uniquely considers the effect of residual stress in the thin films constituting the micro-actu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc29fa56b38b4be82856937d295951bc
https://doi.org/10.1109/transducers50396.2021.9495618
https://doi.org/10.1109/transducers50396.2021.9495618
Publikováno v:
Journal of Microelectromechanical Systems. 28:919-932
This paper presents the design and modeling of a novel piezoelectrically driven micro-lens actuator capable of delivering large out-of-plane displacement with a low driving voltage and fast speed. The design architecture, parameter optimization, mode
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7539f3005fd07efe9cbe8661e53425ae
https://doi.org/10.1109/jmems.2019.2935007
https://doi.org/10.1109/jmems.2019.2935007
Publikováno v:
IEEE Electron Device Letters. 39:889-892
A polysilicon film with high gauge factor formed at a low thermal budget of 450 °C is reported in this paper. The polysilicon was formed using in-situ phosphorus doped ultra-high vacuum e-beam evaporated amorphous silicon film as a precursor for alu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fe96b7aa43c8278d6aa2be731037c899
https://doi.org/10.1109/led.2018.2829481
https://doi.org/10.1109/led.2018.2829481
Publikováno v:
Frontiers of Optoelectronics. 11:53-59
This paper reviews an initial achievement of our group toward the development of on-chip parallel high-speed atomic force microscopy (HS-AFM). A novel AFM approach based on silicon waveguide cantilever displacement sensor is proposed. The displacemen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a98c8bd427ba52da64bf087293142c6c
https://doi.org/10.1007/s12200-018-0774-4
https://doi.org/10.1007/s12200-018-0774-4
Publikováno v:
IEEE Photonics Technology Letters. 29:1407-1410
In this letter, we present a cantilever inverse taper coupler with SiO 2 gap for coupling optical beam between an optical fiber and a sub-micron Si waveguide. The result shows that the input spot size of 5 μm can be coupled to 500 nm×240 nm silicon
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66907a724a05762e8109bbc45e01c6af
https://doi.org/10.1109/lpt.2017.2723901
https://doi.org/10.1109/lpt.2017.2723901