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Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
In this paper, we demonstrate a novel approach to form ultra-sharp high-aspect-ratio and high density nanotips at low temperature suitable for integration with nano-electro-mechanical structures in CMOS compatible manner. For the first time, Cr therm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::842c310476e41cb30689ceab6f465eda
https://doi.org/10.1109/transducers.2017.7994301
https://doi.org/10.1109/transducers.2017.7994301
