Zobrazeno 1 - 10
of 23
pro vyhledávání: '"Che-Heung Kim"'
Autor:
Jeongil Bang, Jaeho Lee, Eun Cheol Do, Hyungjun Kim, Byunghoon Na, Haeryong Kim, Bo-Eun Park, Jooho Lee, Che-Heung Kim, Ho Won Jang, Yongsung Kim
Publikováno v:
NPG Asia Materials, Vol 15, Iss 1, Pp 1-7 (2023)
Abstract Capacitors based on ABO3-type perovskite oxides show considerable promise for overcoming the limitations of nanoscale integration with dynamic random access memory (DRAM) devices. Among the thermodynamically stable perovskite oxides, titanat
Externí odkaz:
https://doaj.org/article/bb1135d9b0774817898bd2466837a5d3
Publikováno v:
Journal of Microelectromechanical Systems. 12:470-478
A micro XY-stage with a 5/spl times/5 mm/sup 2/-area shuttle is fabricated for application in a nanometer-scale data storage device. A central shuttle of the device is designed as a large square on which a high-density recording medium is deposited.
Autor:
Chang-Wook Baek, Hyung-Taek Lim, Che-Heung Kim, Seong-Hyok Kim, Yong-Kweon Kim, June-Young Lee
Publikováno v:
Journal of Micromechanics and Microengineering. 13:72-79
We present a model to explain the electric spring effect of a silicon comb actuator deformed by the footing effect in the deep reactive ion etching process. A deformed comb actuator generally has L-shaped comb electrodes and these mean that the actua
Autor:
Yong-Kweon Kim, Che-Heung Kim
Publikováno v:
Journal of Micromechanics and Microengineering. 12:103-107
In this paper we describe a single-crystal silicon (SCS) micro XY-stage with a 50 × 50 μm2 scanning range. A simple fabrication process using a silicon-on-glass substrate is proposed for a silicon high aspect ratio structure (HARS) and easy release
Publikováno v:
2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).
A reflective type MEMS VOA using lensed fiber-coupling scheme was fabricated. A linear bi-directional comb actuator is used to translate vertical mirror to improve attenuation characteristics in small attenuation range. Various coupling loss factors
Publikováno v:
IEEE/LEOS International Conference on Optical MEMs.
This paper proposes a reflective type microelectromechanical system variable optical attenuator (MEMS VOA) which uses 45 degree tilted vertical movable mirror fabricated by a deep reactive ion etching (DRIE). The optical attenuation is generated by a
Autor:
Yong-Kweon Kim, Che-Heung Kim
Publikováno v:
Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464).
In certain applications, diffractive optical elements have more significant benefits than refractive or reflective elements because of their light volume and specific optical characteristics such as the ability for multiple simultaneous focal points.
Publikováno v:
SPIE Proceedings.
The comb actuator deformed by microloading effect in DRIE process generally has ½L© shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to exp
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
A novel bulk-micromachined gyroscope operating at atmospheric pressure is designed, fabricated and tested. It is fabricated by a simple single-mask process and has high-aspect ratio comb fingers for driving and sensing electrodes. It also has a large
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f53c94a25b38a00c9702b9613a664e4
https://doi.org/10.1007/978-3-642-59497-7_113
https://doi.org/10.1007/978-3-642-59497-7_113
Publikováno v:
Transducers ’01 Eurosensors XV ISBN: 9783540421504
The Micro XY-stage with the large area rectangular shuttle (5 mm×5 mm) is fabricated using an anodically bonded fixture. The large area of a stage is prepared for the integration of a large number of nano-structure array or data-recording media with
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::170f3d97584beb07e39d45f395d9a18e
https://doi.org/10.1007/978-3-642-59497-7_179
https://doi.org/10.1007/978-3-642-59497-7_179