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Autor:
Apichai Bhatranand, Yuttapong Jiraraksopakun, Abdullahi Usman, Rapeepan Kaewon, Chatchai Pawong
Publikováno v:
2021 9th International Electrical Engineering Congress (iEECON).
The new scheme of a non-contact thickness measurement of multi-layer thin films with improving the sensitivity, accuracy, and performance of the measurement techniques is reported in this paper. Single- and double-layer film thickness measurement usi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::830212b57bc90d9cad254b39c799556f
https://doi.org/10.1109/ieecon51072.2021.9440367
https://doi.org/10.1109/ieecon51072.2021.9440367
