Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Charlotte Bouet"'
Autor:
Christophe Navarro, Nicolas Posseme, Maxime Argoud, Maria Gabriela Gusmão Cacho, Charlotte Bouet, Patricia Pimenta-Barros, Khatia Benotmane, Raluca Tiron, Guido Rademaker
Publikováno v:
Journal of Vacuum Science & Technology B
Directed self-assembly (DSA) of block copolymers (BCPs) is an advanced patterning technique being investigated to obtain small and dense patterns for future technological nodes. In order to demonstrate the potential of DSA to extend optical lithograp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b592f435bb071ae63ed2910e550cceba
Autor:
Maxime Argoud, A. Le Pennec, Tommaso Jacopo Giammaria, Xavier Chevalier, Guido Rademaker, Raluca Tiron, Christophe Navarro, Ahmed Gharbi, M.-L. Pourteau, Kaumba Sakavuyi, Charlotte Bouet, Paul F. Nealey, M. G. Gusmao Cacho, Khatia Benotmane, H. Pham, C. Nicolet, A. Paquet
Publikováno v:
Advances in Patterning Materials and Processes XXXVII
Directed Self-Assembly (DSA) of Block Copolymers (BCP) by chemo-epitaxial alignment is a promising high resolution lithography technique compatible with CMOS high-volume manufacturing. It allows overcoming limitations in resolution and local stochast
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::04bba6add8361b70f98da428326e8d11
https://doi.org/10.1117/12.2552003
https://doi.org/10.1117/12.2552003
Autor:
Harolod Stokes, Raluca Tiron, Nathalie Frolet, Tomohiro Motono, Chisayo Mori, Masahiko Harumoto, You Arisawa, Masaya Asai, Maxime Argoud, Karine Jullian, Tanaka Yuji, Charlotte Bouet
Publikováno v:
Advances in Patterning Materials and Processes XXXVII.
Directed Self Assembly (DSA) is a promising technology for complementary patterning in future nodes. As DSA patterning has continued to evolve there has been many efforts to improve defect performance using hardware, processes, and materials. Traditi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1585ef3dfcf6036eab87b2360518b918
https://doi.org/10.1117/12.2561259
https://doi.org/10.1117/12.2561259
Autor:
Romain Jarnias, Patrick Quéméré, Charlotte Bouet, Aurélie Le Pennec, Christophe Navarro, Guido Rademaker, Celia Nicolet, Maxime Argoud, Jérôme Reche, Raluca Tiron
Publikováno v:
Advances in Patterning Materials and Processes XXXVII
This paper introduces line roughness characterization non-straight patterns made of block copolymers (fingerprint patterns). Line Width Roughness have been determined using Power Spectral Density based on a special edge detection developed at CEA-LET
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd7a1c0b0b0c2b3852d203d4aab34544
Autor:
Nicolas Posseme, Charlotte Bouet, Patricia Pimenta-Barros, Aurélie Le Pennec, Maxime Argoud, Raluca Tiron, Guido Rademaker, Khatia Benotmane, Maria Gabriela Gusmão Cacho
Publikováno v:
Journal of Vacuum Science and Technology A
Directed self-assembly (DSA) of block copolymers is one of the most promising solutions investigated to obtain small and dense patterns for the sub-10 nm nodes. One of the most important aspects of the DSA technology is the orientation control of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fefc8b27b35f73a7676748326c444ee8