Optimization of an electron impact ion source on a MEMS time-of-flight mass spectrometer

Autor: Thomas Alava, Charles-Marie Tassetti, Laurent Duraffourg, Frédéric Progent, Sebastien Vigne

Publikováno v: Sensors and Actuators B: Chemical. 243:690-695

This study reports the optimization of the first stages of a MEMS-based, microfabricated time-of-flight mass spectrometer. The authors present an acceptable match between simulations and experimental results. It validates the use of simulations as a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::91f6f97de506b1196e6a824205edf04e
https://doi.org/10.1016/j.snb.2016.11.083

Optimization of the transmission yield of the ion optics on a micro mass spectrometer: Simulations and experimental results

Autor: Charles-Marie Tassetti, Brigitte Desloges, Frédéric Progent, Sebastien Vigne, Marc Gely, Romain Mahieu, Thomas Alava, Christophe Moulin, Laurent Duraffourg

Publikováno v: 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).

This work shows the optimization, both by simulations and experimentally of the ion source optics of a miniaturized time-of-flight mass spectrometer. The simulations are used to speed up the experiments and make them more efficient in finding optimal

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f96b432e74978262e724c74b488bd481
https://doi.org/10.1109/eurosime.2016.7463295

New tunable RF MEMS microinductors design

Autor: J.P. Gilles, Gaelle Lissorgues, Charles-Marie Tassetti

Publikováno v: Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering, IOP Publishing, 2004, 14 (9), pp.S17--S22. ⟨10.1088/0960-1317/14/9/003⟩

International audience; This paper outlines the capabilities of RF MEMS tunable microinductors designed using mechanical displacements that change the magnetic coupling coefficient between circuits. The design and fabrication of a first and an optimi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::adaba47399710fee6325fa3ead176a5f
https://hal.archives-ouvertes.fr/hal-00692957

Effects of a loop array layer on a micro-inductor for future RF MEMS components

Autor: J.-P. Gilles, Gaelle Lissorgues, Charles-Marie Tassetti

Publikováno v: 33rd European Microwave Conference Proceedings (IEEE Cat. No.03EX723C)
33rd European Microwave
33rd European Microwave, 2003, Munich, Germany. ⟨10.1109/EUMC.2003.1262210⟩
Tassetti, Charles-Marie ; Lissorgues, Gaëlle ; Gilles, Jean-Paul (2003) Effects of a loop array layer on a micro-inductor for future RF MEMS Components. In: Gallium Arsenide applications symposium. GAAS 2003, 6-10 October 2003, Munich.

International audience; Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element mo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f35363994498f4f41c05e25858fc8b1e
https://hal.archives-ouvertes.fr/hal-02435455/file/GM_02_03.pdf