Zobrazeno 1 - 10 of 12 pro vyhledávání: '"Chansoo Kang"'
1
Predictive estimation of vacuum ultraviolet emission intensity in a low-pressure inductively coupled hydrogen plasma based on the branching ratio technique
Autor: Duksun Han, Chansoo Kang, Se Youn Moon, Jonggu Han, Jongsik Kim, Woojin Park, Kyunghun Han
Publikováno v: Current Applied Physics. 31:208-213
Vacuum ultraviolet (VUV) emission has recently attracted attention in low pressure processing plasmas because of the possibility of high-energy photon damages on the substrates. To quantify the VUV induced damages during the plasma processes, it is n
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::04d0af31ada2e67acc7195b031edc4d8
https://doi.org/10.1016/j.cap.2021.09.007
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2
Real-time VUV radiation monitoring in low-pressure hydrogen plasma based on fluorescence of sodium salicylate
Autor: Jonggu Han, Woojin Park, Rodolphe Mauchauffé, Keon-Hee Lim, Gwang-Ho Lee, Seongjin In, Jitae Park, Chansoo Kang, Se Youn Moon
Publikováno v: Measurement Science and Technology. 34:025006
Recently, vacuum ultra-violet (VUV) radiation emitted from plasmas has been of particular interest in semiconductor device fabrication because of the effects of its high-energy photons, such as induced damage or curing on low-k materials. Due to the
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::acd09ef0f59c3a6b30cb2ec815a305a0
https://doi.org/10.1088/1361-6501/ac99f3
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