Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Chang-Ou Lee"'
Publikováno v:
Journal of The Electrochemical Society. 137:196-200
Spin‐on‐glass (SOG) has been characterized using process control techniques that provide in‐line monitoring capability. Film composition changes have been observed for different anneal temperatures (300°–1000°C) and ambients (oxygen and nit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4922e41b8a69e5a166d45ba62d78c97
https://doi.org/10.1149/1.2086361
https://doi.org/10.1149/1.2086361
Publikováno v:
Journal of The Electrochemical Society. 135:711-714
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95ca00a133e5069d9347d2c890ed3655
https://doi.org/10.1149/1.2095728
https://doi.org/10.1149/1.2095728
Autor:
P. J. Tobin, Chang‐Ou Lee
Publikováno v:
Journal of The Electrochemical Society. 133:2147-2152
The interstitial oxygen concentration, wafer warpage, and flatness were measured after each step of a typical n‐well CMOS process. It is found that a critical oxygen concentration of 30.0 ppm exists below which no appreciable precipitation takes pl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a8e62307ba82bbb2bced6447c4eadc3
https://doi.org/10.1149/1.2108358
https://doi.org/10.1149/1.2108358
Publikováno v:
Journal of The Electrochemical Society. 135:2111-2113
X-ray fluorescence (XRF) has received a great deal of attention in the last few years as a quantitative means of determining both the stoichiometry and thickness of many different kinds of films. Examples include Ag and Cu films on mica substrates, S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d3d72a84cdcb8e141120af99e01e472b
https://doi.org/10.1149/1.2096222
https://doi.org/10.1149/1.2096222
Publikováno v:
Metallurgical Transactions A. 6:1751-1753
A computer algorithm for the rapid solution of Laue back reflection patterns of sapphire crystals is described, (although other hexagonal systems could be indexed with minor changes). Reflections of planes having indices (3, 3, 3) and lower are index
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0663f078d38b97203ad253edf5a05b47
https://doi.org/10.1007/bf02642303
https://doi.org/10.1007/bf02642303
Publikováno v:
Advances in Resist Technology and Processing VI.
Fourier transform infrared (FUR) spectroscopy was used to study the effects of various resist process variables on the photospeed. Resist components which are responsible for photospeed changes were identified. The doublet peak around 2100 cm -1 , wh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c02251b578ee13c8174f9f9af3a90f23
https://doi.org/10.1117/12.953045
https://doi.org/10.1117/12.953045
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 6:1533
A nondestructive, noncontact, optical method was successfully developed to measure thicknesses of titanium and titanium silicide thin films by observing infrared transmissions. These transmissions can be substantial for film thicknesses of up to 850
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1e4f100f75bdf9ef0708a26c0996eaf
https://doi.org/10.1116/1.584209
https://doi.org/10.1116/1.584209
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1988, Vol. 6 Issue 5, p1533-1536, 4p
Publikováno v:
Metallurgical transactions. Part A: Physical Metallurgy & Materials Science; 1975, Vol. 6 Issue 9, p1751-1753, 3p
Autor:
Jean-pierre Fillard
This book contains the most recent information on optical nanoscopy. Far-Field and Near-Field properties on e.m. waves are presented which illustrate how optical images can be obtained from sub-micron objects. Scanning Probe techniques and computer p
