Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Chang-Hasnain C. Chang"'
Autor:
Chang-Hasnain C. Chang, Phillip J. Batson, David Attwood, Patrick P. Naulleau, Jeffrey Bokor, Sang Hun Lee, Kenneth A. Goldberg
Publikováno v:
SPIE Proceedings.
The extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) was developed and implemented at Lawrence Berkeley National Laboratory to meet the significant measurement challenge of characterizing EUV projection lithography o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce0777c8289f2eca4c6e3db7c07c7f6d
https://doi.org/10.1117/12.371113
https://doi.org/10.1117/12.371113
Autor:
Richard J. Gaughan, Cynthia J. Bresloff, Chang-Hasnain C. Chang, Patrick P. Naulleau, John E. M. Goldsmith, Henry N. Chapman, Jeffrey Bokor, Sang Hun Lee, Kenneth A. Goldberg
Publikováno v:
SPIE Proceedings.
Recent experiments with four 10x EUV imaging systems provide the first direct comparisons of visible-light and at- wavelength EUV interferometers performed using the state-of- the-art measurement tools that will be used to assemble and align the next
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc01d920ebda8f13b9c3dd6b56aea362
https://doi.org/10.1117/12.351138
https://doi.org/10.1117/12.351138
Autor:
Chang-Hasnain C. Chang, Geraldine Lamble, Alastair A. MacDowell, Richard Celestre, J. R. Patel, Howard A. Padmore
Publikováno v:
SPIE Proceedings.
The authors have developed an x-ray micro-probe facility utilizing mirror bending techniques that allow white light x-rays (4--12keV) from the Advanced light Source Synchrotron to be focused down to spot sizes of micron spatial dimensions. They have
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9e868ef67b3fae125c64c22417d8d6cf
https://doi.org/10.1117/12.330341
https://doi.org/10.1117/12.330341
Autor:
Jeffrey Bokor, Patrick P. Naulleau, Sang Hun Lee, Kenneth A. Goldberg, Chang-Hasnain C. Chang, Cynthia J. Bresloff, Phillip J. Batson, David Attwood
Publikováno v:
SPIE Proceedings.
The phase-shifting point diffraction interferometer (PS/PDI) has recently been developed and implement at Lawrence Berkeley National Laboratory to meet the significant measurement challenge of characterizing extreme UV (EUV) projection lithography sy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a59b088560361953bdc1a4045bceee14
https://doi.org/10.1117/12.309563
https://doi.org/10.1117/12.309563
Autor:
Malcolm R. Howells, Chang-Hasnain C. Chang, Alastair A. MacDowell, Keith D. Franck, Howard A. Padmore, J. R. Patel, Reuben Sandler, Richard Celestre, Scott C. Locklin
Publikováno v:
SPIE Proceedings.
Of the many methods used to focus x-rays, the se of mirrors with an elliptical curvature shows the most promise of providing a sub-micron white light focus. Our group has been developing he techniques of controlled bending of mirror substrates in ord
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88df125e6e20f4c9248000848fa9aea1
https://doi.org/10.1117/12.279374
https://doi.org/10.1117/12.279374