Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Chang-Auk Choi"'
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 27:8-13
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f00c6c8a90d62c095b453200f79ec50
https://doi.org/10.4313/jkem.2014.27.1.8
https://doi.org/10.4313/jkem.2014.27.1.8
Publikováno v:
Journal of Microelectromechanical Systems. 20:1269-1276
We propose a new capacitive microinclinometer where oblique comb electrodes and double-folded suspension springs are aligned parallel to the vertical (111) plane of (110) silicon. The oblique comb utilizes both the overlapped area and the gap between
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f300102435aa0a2a41d28da8e51d0315
https://doi.org/10.1109/jmems.2011.2167662
https://doi.org/10.1109/jmems.2011.2167662
Autor:
Jong Tae Baek, Yong Il Lee, Chang Seung Lee, Jong Hyun Lee, Hyung Joun Yoo, Won Ick Jang, Chang Auk Choi
Publikováno v:
Sensors and Actuators A: Physical. 64:27-32
One of the major issues in surface micromachining is process-induced failures of freestanding microstructures after the removal of sacrificial layers. This failure process consists of temporary deformation due to capillary force during drying and per
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b873f70d3920c212a5cf621aac55e95
https://doi.org/10.1016/s0924-4247(98)80054-x
https://doi.org/10.1016/s0924-4247(98)80054-x
Autor:
Jaewoo Lee, Jongdae Kim, Sewan Heo, Yil Suk Yang, Chang-Auk Choi, Chang-Han Je, Myung-Lae Lee, S.C. Ko
Publikováno v:
2009 IEEE Sensors.
A surface-micromachined capacitive-type micro-electro-mechanical system (MEMS) acoustic sensor with X-shape bottom electrode anchor on a Si substrate is presented. As it is designed to be implemented on only one side of a substrate for a simple monol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e11d1206bce153c55dc720d386e8cac1
https://doi.org/10.1109/icsens.2009.5398401
https://doi.org/10.1109/icsens.2009.5398401
Publikováno v:
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
A novel high resolution micro capacitive inclinometer has been developed using (110) silicon. KOH crystalline wet etching was employed after silicon deep reactive ion etching (DRIE) to reduce morphologic defects on the sidewalls of oblique comb elect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::875272bf88f7237706630f99a0f963ea
https://doi.org/10.1109/memsys.2009.4805503
https://doi.org/10.1109/memsys.2009.4805503
Autor:
Chang-Han Je, Dae-Hun Jeong, Chang-Auk Choi, Sung-Sik Yun, Jong-Hyun Lee, Myung-Lae Lee, Min-Ho Jun, Gunn Hwang, Jae-Yong An
Publikováno v:
2008 IEEE Sensors.
A micromachined capacitive inclinometer has been developed to detect inclination angles for a position sensing application. In order to enhance resolution, a (110) crystalline silicon-on-patterned-insulator (COPI) process has been proposed to remove
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f593b598fff5dadb8a7149f4d85854af
https://doi.org/10.1109/icsens.2008.4716528
https://doi.org/10.1109/icsens.2008.4716528
Autor:
Chang Auk Choi, Preston Galle, Chang Hyeon Ji, Mark G. Allen, Jin Ho Lee, Florian Herrault, Xiaosong Wu, Seong-Hyok Kim
Publikováno v:
Journal of Micromechanics and Microengineering. 19:094010
This paper presents two types of electromagnetic power generators exploiting direct conversion of airflow into mechanical vibration: 1) a windbelt-based vibratory linear micro-generator targeting strong airflows, and 2) a Helmholtz resonator based ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5a17d039fd8bb9c9d622363b5ddcc5bd
https://doi.org/10.1088/0960-1317/19/9/094010
https://doi.org/10.1088/0960-1317/19/9/094010
Autor:
Chang-Han Je, Gunn Hwang, Chang-Auk Choi, Myung-Lae Lee, Semyung Wang, Dae-Hun Jeong, Jong-Hyun Lee, Sung-Sik Yun
Publikováno v:
Journal of Micromechanics and Microengineering. 19:035025
This paper presents a novel fabrication method of scalloping-free and footing-free vertical electrodes for micromachined capacitive inclinometers with a high sensing resolution. The proposed fabrication method is based on additional crystalline wet e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b007f273c7a0f241c545ee59a8b7476
https://doi.org/10.1088/0960-1317/19/3/035025
https://doi.org/10.1088/0960-1317/19/3/035025
Autor:
Sung-Sik Yun, Dae-Hun Jeong, Jae-Yong An, Minho Jun, Jong-Hyun Lee, Chang-Han Je, Myung-Lae Lee, Gunn Hwang, Chang-Auk Choi
Publikováno v:
2008 IEEE Sensors; 2008, p662-665, 4p