Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Chang Kai-Fung"'
Autor:
Huang, Long-Sun, Pheanpanitporn, Yotsapoom, Yen, Yi-Kuang, Chang, Kai-Fung, Lin, Lung-Yi, Lai, Dar-Ming
Publikováno v:
In Biosensors and Bioelectronics 15 September 2014 59:233-238
Autor:
Alexander Kalnitsky, Huang Shih-Fen, Benior Chen, Hu Fan, Terrence Yu, Sean Cheng, Leo Tsai, Lin Anderson, Victor Shih, Vincent Teng, Yeur-Luen Tu, Lin You-Ru, Huang Fu-Chun, Yi-Heng Tsai, Ching-Hui Lin, Julian Lee, Lee-Chuan Tseng, Chen Yen-Wen, Liao Yan-Jie, Ching-Hua Chiu, Kelvin Tai, Chih-Ming Chen, Chang Kai-Fung
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This work presents the piezoelectric process technology developed in a high volume foundry for emerging MEMS applications. Innovative reliability enhancement techniques for piezoelectric devices are demonstrated to significantly boost (1) dielectric