Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Chang, Meng‐Hao"'
Autor:
CHANG MENG HAO, 張孟浩
89
Effects of C+ and N2+ implantation on the electrical properties of liquid-phase-deposition (LPD)Si(O,F) films as a function of the ion dose were studied. Upon C+ implantation some Si-F bonds were decomposed concurrently with the formation of
Effects of C+ and N2+ implantation on the electrical properties of liquid-phase-deposition (LPD)Si(O,F) films as a function of the ion dose were studied. Upon C+ implantation some Si-F bonds were decomposed concurrently with the formation of
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/74686085795005727683
Publikováno v:
SID Symposium Digest of Technical Papers; Jun2015, Vol. 46 Issue 1, p1717-1720, 4p
Publikováno v:
Applied Mechanics and Materials; April 2015, Vol. 748 Issue: 1 p57-61, 5p
Publikováno v:
SID Symposium Digest of Technical Papers; May2016, Vol. 47 Issue 1, p1744-1746, 3p
Autor:
So, Franky, Adachi, Chihaya, Lin, Jin-Sheng, Ku, Chun-Neng, Huang, Pang-Chi, Wu, Cheng-An, Chang, Meng-Hao, Liou, Jia-Lun, Tseng, Mei-Rurng
Publikováno v:
Proceedings of SPIE; October 2014, Vol. 9183 Issue: 1 p91831O-91831O-6, 826486p
Autor:
So, Franky, Adachi, Chihaya, Kim, Jang-Joo, Huang, Pang-Chi, Chang, Meng-Hao, Lin, Jin-Sheng, Tseng, Mei-Rurng
Publikováno v:
Proceedings of SPIE; August 2017, Vol. 10362 Issue: 1 p1036225-1036225-5