Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Chandra, Jagadeesh SV"'
Publikováno v:
IndraStra Global.
DC reactive magnetron sputtering technique was employed for deposition of titanium dioxide (TiO2) films. The films were formed on Corning glass and p-Si (100) substrates by sputtering of titanium target in an oxygen partial pressure of 6x10-2 Pa and
Publikováno v:
IndraStra Global.
Tantalum oxide (Ta2O5) films were formed on silicon (111) and quartz substrates by dc reactive magnetron sputtering of tantalum target in the presence of oxygen and argon gases mixture. The influence of substrate bias voltage on the chemical binding
Publikováno v:
IndraStra Global.
dc reactive magnetron sputtering technique was employed for deposition of tantalum oxide films on quartz and silicon substrates by sputtering of pure tantalum target in the presence of oxygen and argon gases under various substrate temperatures in th
Publikováno v:
IndraStra Global.
Rf magnetron sputtering technique was employed for preparation of tantalum oxide films on quartz and crystalline silicon (111) substrates held at room temperature by sputtering of tantalum in an oxygen partial pressure of $1X10^{-4} mbar$. The films