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pro vyhledávání: '"Chan-Min Kang"'
Autor:
Jung-Ho Park, Chan-Min Kang
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 24:156-161
The present study introduces a novel wet etching technique for nanostructure fabrications which usually requires low surface roughness. Using the current method, acquired profiles were smooth even in the nanoscale, which cannot be easily achieved wit
Publikováno v:
Journal of the Korean Physical Society. 54:1002-1005
The etching properties of ZnO thin lms in an inductively coupled Cl2/BCl3/Ar plasma (ICP) were studied in terms of the etch rate and the selectivity as functions of the gas mixing ratio, the ICP coil power and the dc bias voltage. A maximum etch rate
Publikováno v:
Journal of the Korean institute of surface engineering. 41:83-87
This study described the effects of RF power, DC bias voltage, chamber pressure and gas mixing ratio on the etch rates of TiN thin film and selectivity of TiN thin film to with /Ar gas mixture. When the gas mixing ratio was (20%)/Ar(80%) with other c
Publikováno v:
Ferroelectrics. 357:179-184
The investigation of etch characteristics for (Na 0.5 K 0.5 )NbO 3 (NKN) thin films in Cl 2 /Ar inductively coupled plasma was carried out. It was found that the NKN etch rate is a monotonic function of both input power and negative dc bias as it gen
Publikováno v:
Solid State Phenomena. :65-68
The etching properties of the ZnO thin films in the inductively coupled Cl2/Ar plasma (ICP) were studied in the terms of etch rate and selectivity as functions of gas mixing ratio, ICP coil power and dc bias voltage. The maximum etch rate of 129.3 nm
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Autor:
Chan, Min Kang
Carbon–Hydrogen bond (C–H) activation offers chemists a direct route to perform chemical transformation on simple and complex molecules without prior functionalization on the structure. It also allows previously hard to access chemical feedstock
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______1392::010e9e6b451fdad21e9356f47ae4982d
http://hdl.handle.net/10356/62205
http://hdl.handle.net/10356/62205
Publikováno v:
SPIE Proceedings.
Nowadays, applications of surface plasmon (SP) were highlighted for facilitating the all integrated optical circuit in nano space. We introduce the design and fabrication of a periodic array of gold nanostructure for detection of light which is propa
Publikováno v:
Ferroelectrics; 2007, Vol. 357 Issue 1, p179-184, 6p, 1 Diagram, 4 Graphs