Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Chaddy Kharrat"'
Publikováno v:
Procedia Chemistry. 1:536-539
This abstract presents the design, the fabrication and the measurements of a very small and sensitive resonantaccelerometer. The sensor is based on a strain sensitive vibrating beam attached to a mass. The vibration of thebeam is electrostatically dr
Publikováno v:
2008 IEEE Sensors.
A simple dynamic detection of the resonance frequency shift in NEMS resonant mass sensors is described. This is done without the use of an external frequency sweep signal nor a frequency counter limiting the dynamic variation detection. Neither an am
Autor:
Sebastien Hentz, C. Marcoux, Chaddy Kharrat, Eric Colinet, Laurent Duraffourg, Philippe Andreucci, Sebastien Labarthe, Ervin Mile, Guillaume Jourdan, Igor Bargatin
Publikováno v:
Nanotechnology. 21:165504
We report an actuation/detection scheme with a top-down nanoelectromechanical system (NEMS) for frequency shift based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-pl