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Autor:
R. Berger, L. Scandella, H. Fuhrmann, J.-H. Fabian, Ch. Musil, T. Mezzacasa, Ernst Meyer, Jens Gobrecht
Publikováno v:
Ultramicroscopy. 82:69-77
Finite element analysis (FEA) is used to study the effect of geometric variations on the properties of rectangular cantilevers and U-shaped Joule-heated cantilevers. Simulations of locally thinned cantilevers as well as of cantilevers modified by the