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pro vyhledávání: '"Cezary Janicki"'
Autor:
Carol Boye, Roland Hahn, Joe Connors, Rajesh Ghaskadvi, Christopher J. Penny, Cezary Janicki, Donna Boyles
Publikováno v:
2012 SEMI Advanced Semiconductor Manufacturing Conference.
This paper proposes that the non-visual defect rate for Litho layers is an indicator of the quality of the process up to and including Litho. “Non-visual” (NV) defects are those detected by optical defect inspection systems but not re-detected by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8edffbe44e0a36b128c28bbd218882f9
https://doi.org/10.1109/asmc.2012.6212931
https://doi.org/10.1109/asmc.2012.6212931
