Assessing Various Analytical Techniques with Different Lateral Resolution by Investigating Spin-coated Inorganic Contamination on Si Wafer Surfaces

Autor: Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Luisa, Maria, Codegoni, Davide, Grasso, Salvatore, Cazzini, Elena, Bersani, Massimo, Gennaro, Salvatore, Kolbe, Michael, Mueller, Matthias, Kregsamer, Peter, Posch, Florian

Publikováno v: ECS Transactions; September 2009, Vol. 25 Issue: 3 p311-323, 13p

Highly Sensitive Detection of Inorganic Contamination

Autor: Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, G., Pello, C., Polignano, Maria Luisa, Codegoni, Davide, Grasso, Salvo, Cazzini, Elena, Bersani, M., Lazzeri, P., Gennaro, S., Kolbe, Michael, Müller, Matthias, Kregsamer, P., Posch, Florian

Publikováno v: Diffusion and Defect Data Part B: Solid State Phenomena; January 2009, Vol. 145 Issue: 1 p101-104, 4p

Comparability of TXRF Systems at Different Laboratories

Autor: Nutsch, Andreas, Beckhoff, Burkhard, Altmann, Roswitha, Polignano, Maria Luisa, Cazzini, Elena, Codegoni, Davide, Borionetti, Gabriella, Kolbe, Michael, Mueller, Matthias, Mantler, Claus, Streli, Christina, Kregsamer, Peter

Publikováno v: ECS Transactions; September 2009, Vol. 25 Issue: 3