Microsystems elements based on free-standing thick-films made with a new sacrificial layer process

Autor: Lucat, Claude, Ginet, Patrick, Castille, Christophe, Debéda, Hélène, Ménil, Francis

Publikováno v: In Microelectronics Reliability 2008 48(6):872-875

Study of self-actuated screen-printed PZTcantilevers

Autor: Lakhmi, Riadh, Castille, Christophe, Debéda, Hélène, Maglione, Mario, Lucat, Claude

Publikováno v: CICMT
CICMT, 2011, San Diego, United States. 6 p

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::9332dbe695d7fde70a3a88986f304546
https://hal.archives-ouvertes.fr/hal-00585451

New thick-film process based on screen-printing deposition for free-standing piezoelectric microsystems

Autor: Lucat, Claude, Debéda, Hélène, Castille, Christophe, Lakhmi, Riadh, Dufour, Isabelle

Publikováno v: Proceedings of Journées Nationales sur les Technologies Emergentes en Micronanofabrication 2010
Journées Nationales sur les Technologies Emergentes en Micronanofabrication 2010
Journées Nationales sur les Technologies Emergentes en Micronanofabrication 2010, 2010, Palaiseau, France. 2 p

National audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::674517ebe046a38dcc64f0cacaabf7d8
https://hal.archives-ouvertes.fr/hal-00527017

Piezoelectric properties of free-standing PZT thick films

Autor: Castille, Christophe, Lucat, Claude, Ginet, Patrick, Maglione, Mario

Publikováno v: Electroceramics XI
Electroceramics XI, 2008, Manchester, United Kingdom

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::21a79ff80e2a3637326ef993147b5c7a
https://hal.archives-ouvertes.fr/hal-00322348

On a new sacrificial layer process of free-standing piezoelectric thick films for MEMS applications

Autor: Lucat, Claude, Ginet, Patrick, Von Der Mühll, Regnault, Castille, Christophe, Ménil, Francis, Maglione, Mario

Publikováno v: International Symposium on Integrated Ferroelectrics 2007
International Symposium on Integrated Ferroelectrics 2007, May 2007, Bordeaux, France

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::105537cb500dbd0677b720375f656293
https://hal.archives-ouvertes.fr/hal-00164609