Zobrazeno 1 - 2
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pro vyhledávání: '"Cassia Tiemi Azevedo"'
Autor:
Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Ayano Tsuchida, Miho Morita, Yasushi Oshikane, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
Publikováno v:
Micro and Nanostructures. 166:207228
Autor:
Kentaro Kawai, Miho Morita, Yasunori Nakamukai, Mizuho Morita, Cassia Tiemi Azevedo, Junichi Uchikoshi, Kenta Arima, Yuki Miyata
Publikováno v:
Microelectronic Engineering. 180:93-95
A new method to improve the thickness uniformity of a silicon-on-insulator layer in a defined area by photoetching with N -fluoropyridinium salts using a projector was proposed. The method involved initial calculation of the red–green–blue tone d