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pro vyhledávání: '"Carsten Raudzis"'
Publikováno v:
Journal of Microelectromechanical Systems. 18:1326-1334
Two different but similar microdevices were used for studying in-plane (IP) and out-of-plane (OP) adhesions in microelectromechanical systems (MEMS). With these devices, the combined influence of temperature, surface chemistry, contact geometry, and
Autor:
Carsten Raudzis, Heinz Eisenschmid, Gottfried Flik, Winfried Schoenenborn, Frank Schatz, Hans-Peter Trah
Publikováno v:
MRS Proceedings. 687
According to market surveys automotive microsensors will evolve into a multi-billion dollar business by 2005. Key roles are attributed to inertial sensors for passenger safety systems, and mass flow and pressure sensors for engine management systems.