The EBES4 electron-beam column.

Autor: Thomson, M. G. R., Liu, R., Collier, R. J., Carroll, H. T., Doherty, E. T., Murray, R. G.

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1987, Vol. 5 Issue 1, p53-56, 4p