Výsledky vyhledávání - "Carpentier, J.F."

Akademický článek

Numerical and analytical modelling of holed MEMS resonators

Autor: Civet, Y., Casset, F., Carpentier, J.F., Basrour, S.

Publikováno v: In Sensors & Actuators: A. Physical October 2012 186:230-235

Holed MEMS resonators with High aspect ratio and frequency compensated

Autor: Civet, Y., Casset, F., Carpentier, J.F., Icard, B., Bustos, J., Leverd, F., Mercier, D., Basrour, S.

Publikováno v: Proc of 22nd Micromechanics and Micro systems Europe Workshop (MME'11)
22nd Micromechanics and Micro systems Europe Workshop (MME'11)
22nd Micromechanics and Micro systems Europe Workshop (MME'11), Jun 2011, Tonsberg, Norway. pp.158-161

ISBN 978-82-7860-224-9 http://www.mme2011.org/proceedings.htm; International audience; In this paper, we present the design and manufacturing of frequency compensated Micro-Electro-Mechanical (MEM) resonators, which fulfilled industry requirements co

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::05e06cbf1da70dcb92e7539adc83f654
https://hal.archives-ouvertes.fr/hal-00643898

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Method of adjusting the resonance frequency of a micro-machined element

Autor: Civet, Y., Casset, F., Basrour, Skandar, Carpentier, J.F.

Publikováno v: France, Patent n° : 11/52729. 2011

B7:C7:A5:80:3D:8B:A3:98:FC:42:31:31:A4:AB:45:07:F1:0D:CD:E8; La présente invention concerne les éléments vibrants micro-usinés se trouvant dans certains composants électromécaniques tels que les résonateurs, les capteurs de mouvement (accélé

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::c1721d9e9b1e3492e0065928d99e6be6
https://hal.archives-ouvertes.fr/hal-00653940

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Frequency shift of MEMS electromechanical resonators induced by process variation

Autor: Casset, F., Arcamone, J., Niel, A., Lorent, E., Marcoux, C., Civet, Y., Durand, C., Ollier, E., Renaux, Ph., Carpentier, J.F., Ancey, P., Robert, P.

Publikováno v: Proc. of 21st Micromechanics and Microsystems Europe Workshop (MME'10)
21st Micromechanics and Microsystems Europe Workshop (MME'10)
21st Micromechanics and Microsystems Europe Workshop (MME'10), Sep 2010, Enschede, Netherlands

International audience; MEMS resonators can bring an important added value in many fields of application. For example, MEMS resonators are good candidates to replace quartz oscillators. In this paper, we present MEMS resonator designs and measurement

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::c3c26c703a3c277b94e576382d4873b0
https://hal.archives-ouvertes.fr/hal-00544329

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MEMS resonator frequency compensation by 'in-line' trimming'

Autor: Civet, Y., Casset, F., Carpentier, J.F., Decossas, S., Haccart, T., Basrour, Skandar

Publikováno v: Proc. of 11th International Symposium on RF MEMS and RF Microsystems (Memswave'10)
11th International Symposium on RF MEMS and RF Microsystems (Memswave'10)
11th International Symposium on RF MEMS and RF Microsystems (Memswave'10), Jun 2010, Otranto, Italy

International audience; In this paper, compensation of frequency shifting of MEMS resonators using an end-of-line process step is presented. The technique involves measuring the frequency during manufacturing steps before altering it by added materia

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::9525ae6f99dd19653c22551abbe2d59a
https://hal.archives-ouvertes.fr/hal-00544309

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