Zobrazeno 1 - 1
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pro vyhledávání: '"Carl Maier"'
Autor:
Remco Jochem Sebastiaan Groenendijk, Carl Maier, Ton van Niftrik, Daniel Corliss, Rene Carpaij, James Waddell, Hirokazu Kato, Guillaume Landie, Kehan Tian, Takao Tamura, Gregory McIntyre, R. Johnson, Ryoung-han Kim, Erin Mclellan, Christopher F. Robinson, Thomas Pepin, Scott Halle, Jerry Woods, Anthony Francis Scaduto, Matt Colburn
Publikováno v:
SPIE Proceedings.
This paper will describe the development, qualification, monitoring, and integration into a production environment of the world's first fully programmable illuminator for optical lithography. FlexRay TM, a programmable illuminator based on a MEMs mul
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac90235ea0e45a81504d3c1d7523dfe3
https://doi.org/10.1117/12.879483
https://doi.org/10.1117/12.879483
