Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Carl E. Picciotto"'
Autor:
Carl E. Picciotto, Wei Wu, William M. Tong, Jun Gao, Shih-Yuan Wang, Deborah Morecroft, R. Stanley Williams, Joel K. W. Yang, Qiangfei Xia, Yufeng Chen, Zhaoning Yu, Jonathan Bartman, Karl K. Berggren, Robert G. Walmsley, Inkyu Park
Publikováno v:
Nano Letters. 8:3865-3869
We introduce the concept of wafer bowing to affect nanoimprinting. This approach allows a design that can fit the key imprinting mechanism into a compact module, which we have constructed and demonstrated with an overlay and resolution of0.5 microm a
Autor:
Carl E. Picciotto, Jun Gao
Publikováno v:
Solid State Phenomena. :817-822
In this paper, we will present theory for nDSE (nano-scale Displacement Sensing and Estimation) and its application framework: IDMA (Indirect Displacement-Measurement-based Alignment). nDSE presents a clear and novel theoretical explanation to displa
Publikováno v:
Applied Physics A. 80:1265-1278
In this paper we introduce NDSE (nanoscale displacement sensing and estimation) technology, encompassing a family of algorithms which estimate image displacements to within a few nanometers using optical microscopy, and to sub-nanometers using an ima
Publikováno v:
Applied Physics A. 80:1287-1299
In this paper we discuss the application of NDSE [1] (Hewlett Packard’s nanoscale displacement sensing and estimation technology) as an overlay metrology tool. We describe a method where nanoscale displacement sensing forms the basis of a precision
Publikováno v:
Haptics: Perception, Devices, Mobility, and Communication ISBN: 9783642314001
EuroHaptics (1)
EuroHaptics (1)
We study masking of key-click feedback signals on a flat surface for ten-finger touch typing with localized tactile feedback. We hypothesize that people will attribute tactile feedback to the key being pressed, even with global tactile feedback, prov
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a031e1d110229b14cb8fcc37cfb4b72d
https://doi.org/10.1007/978-3-642-31401-8_23
https://doi.org/10.1007/978-3-642-31401-8_23
Publikováno v:
Nanotechnology. 20(25)
We present a low-cost overlay alignment metrology solution for nanoimprint lithography that uses optical microscopy, displacement-sensing algorithms, and specially-designed imprint molds that include shallow alignment marks that are visible to the op
Publikováno v:
SPIE Proceedings.
Displacement sensing and estimation (DSE) is important preprocessing task for many image-based processing systems that extract information from multiple images. In last two years, we gained significant insight of the nature of DSE and developed theor
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 24:3094
In this article, the authors present theoretical background and practical procedures for linking displacement sensing and estimation to nanoscale alignment. The authors discuss the application of nanoscale displacement sensing and estimation (nDSE)-b
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23:3047
In this article, we present our nanoscale displacement sensing and estimation (nDSE) theory,which describes the theoretical limitations of displacement-sensing and predicts thepracticality of measuring nanoscale displacements using optical microscopy