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pro vyhledávání: '"Carine Pastore"'
Autor:
Carine Pastore, Brian Bilenberg, Søren Jacobsen, Simon Riis Enghoff, Asger Vig Larsen, Theodor Nielsen, Claus Jeppesen, Anders Kristensen
Publikováno v:
Technical University of Denmark Orbit
Sub-micron structures are routinely fabricated by electron beam lithography (EBL). However EBL is a time consuming and costly technology. We present a technology for fabrication of nanostructures by standard UV-lithography and thermal nanoimprint lit