Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Camille L. M. Everhart"'
Autor:
Martin M. Winterkorn, Fritz B. Prinz, Camille L. M. Everhart, Hyo Jin K. Kim, Kirsten E. Kaplan, Thomas W. Kenny
Publikováno v:
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
MEMS Thermal accelerometers are typically driven and sensed entirely at DC, an approach that contributes to their relatively high drift and noise. This work presents several novel operation modes based on independent modulation of the heater and the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd7e82f3ff82deea50cae9296891eca6
https://doi.org/10.1109/inertial48129.2020.9090061
https://doi.org/10.1109/inertial48129.2020.9090061
Autor:
Gary O'brien, Kirsten E. Kaplan, Camille L. M. Everhart, Fritz B. Prinz, Dongsuk D. Shin, Thomas W. Kenny, Martin M. Winterkorn
Publikováno v:
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
Thermal accelerometers exhibit large changes in sensitivity with ambient temperature. Here we present an active compensation scheme that mitigates the effect of environmental temperature fluctuations on device performance. Ambient conditions are cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd9540ecaa01c2204bd2631aae402a82
https://doi.org/10.1109/isiss.2018.8358154
https://doi.org/10.1109/isiss.2018.8358154
Autor:
Camille L. M. Everhart, Martin M. Winterkorn, Kirsten E. Kaplan, Mehdi Asheghi, Heungdong Kwon, Kenneth E. Goodson, J. Provine, Thomas W. Kenny, Fritz B. Prinz
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems (MEMS).
This paper presents new results from the first thermal accelerometer fabricated using Plasma Enhanced Atomic Layer Deposition. PEALD allows for ultrathin high-density platinum films that deliver excellent stability and accuracy [1]. We offer a 100x c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b024b4a4cd5ef5ff814b8524e2e5196
https://doi.org/10.1109/memsys.2018.8346721
https://doi.org/10.1109/memsys.2018.8346721
Autor:
Thomas W. Kenny, Camille L. M. Everhart, Eldwin J. Ng, Yushi Yang, Chae Hyuck Ahn, Vu A. Hong
Publikováno v:
Journal of Microelectromechanical Systems. 24:730-741
Resonators fabricated in heavily doped silicon have been noted to have a reduced frequency-temperature dependence compared with lightly doped silicon. The resonant frequency of silicon microelectromechanical systems (MEMS) resonators is largely gover
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b504570102e1af528a7b22c01c4899f
https://doi.org/10.1109/jmems.2014.2347205
https://doi.org/10.1109/jmems.2014.2347205
Autor:
Kuan-Lin Chen, David B. Heinz, M.W. Messana, Eldwin J. Ng, Manu Agarwal, Markus Lutz, Yushi Yang, Camille L. M. Everhart, Ian B. Flader, Thomas W. Kenny, V. Qu, Andrew B. Graham, Gary Yama, Matthew A. Hopcroft, Yunhan Chen, Rob N. Candler, Vu A. Hong, Aaron Partridge, B. Kim, Renata Melamud, Shasha Wang, Gaurav Bahl, Hyung Kyu Lee, James Christian Salvia, Gary O'brien, Chia-Fang Chiang, S. Yoneoka, Chae Hyuck Ahn
Publikováno v:
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4ecaada99982c1a406ed0fb086d3a68c
https://doi.org/10.1109/memsys.2015.7050869
https://doi.org/10.1109/memsys.2015.7050869
Autor:
Thomas W. Kenny, Kimberly L. Harrison, Yushi Yang, Roger T. Howe, David B. Heinz, Chae Hyuck Ahn, Camille L. M. Everhart, Vu A. Hong, Eldwin J. Ng
Publikováno v:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).
A large dc bias voltage (tens of volts) is often useful for the operation of capacitive MEMS devices. Charge-biasing techniques have been demonstrated to be able to replace a bias voltage source by trapping an equivalent charge on an electrically flo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd7d4840557e1a37629579b5cb8c606d
https://doi.org/10.1109/memsys.2014.6765882
https://doi.org/10.1109/memsys.2014.6765882
Autor:
Dedra E. Whitfield, Camille L. M. Everhart, Qiwei Yang, Patricia Parsons-Wingerter, Steven A. Fisher, Krishnan Radhakrishnan, Hongbin Liu
Publikováno v:
Developmental dynamics : an official publication of the American Association of Anatomists. 238(11)
We hypothesized that oxygen gradients and hypoxia-responsive signaling may play a role in the patterning of neural or vascular cells recruited to the developing heart. Endothelial progenitor and neural cells are recruited to and form branched structu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a97212241c7fbe71afddbde5e8b42c69
https://pubmed.ncbi.nlm.nih.gov/19842184
https://pubmed.ncbi.nlm.nih.gov/19842184
Autor:
Yushi Yang, Chae Hyuck Ahn, Camille L. M. Everhart, Vu A. Hong, Eldwin J. Ng, Thomas W. Kenny
Publikováno v:
Journal of Microelectromechanical Systems. 24:2178-2178
There is an error in one set of values listed in Table III, page 735. The cell in the 4th row from the bottom (Ring ) and rightmost column (P6.6) should read “-3.05 / -58.10 / 19.46”, not “-58.10 / -30.99 / 19.46”.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::791971eeaa6d6999409b8859c0823a78
https://doi.org/10.1109/jmems.2015.2483373
https://doi.org/10.1109/jmems.2015.2483373