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pro vyhledávání: '"Calvin Chen Chii Wean"'
Autor:
Adlai H. Smith, Calvin Chen Chii Wean, Joseph J. Bendik, Yuji Yamaguchi, Venky Subramony, Ranjan Khurana
Publikováno v:
SPIE Proceedings.
The need for lithographic tool advances for reducing feature size, pitch (low k1 processing), and improving overlay stems directly from next generation circuit layout and performance roadmaps 1 . Overlay error or layer-to-layer misalignment tolerance