Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Callan, Neal"'
Autor:
Hsu, Stephen, Chen, Luoqi, Li, Zhipan, Park, Sean, Gronlund, Keith, Liu, Hua-Yu, Callan, Neal, Socha, Robert, Hansen, Steve
Publikováno v:
Proceedings of SPIE; Nov2008, Issue 1, p714010-714010-10, 10p
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p1279-1286, 8p
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p626-637, 12p
Simple method for restricting OPC model minimum spacing and width for a no-failure imaging solution.
Autor:
Belova, Nadya, Callan, Neal P.
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p649-658, 10p
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p691-699, 9p
Autor:
Bailey, George E., Callan, Neal P., Taravade, Kunal N., Jensen, John V., Eynon, Benjamin G., Martin, Patrick M., Kamberian, Henry H., Taylor, Darren, Farnbach, Rick S.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p203-214, 12p
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p153-161, 9p
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p246-255, 10p
Autor:
Croffie, Ebo H., Callan, Neal P.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p287-296, 10p
Application of rigorous electromagnetic simulation to SLM-based maskless lithography for 65-nm node.
Autor:
Croffie, Ebo H., Eib, Nick, Callan, Neal P., Baba-Ali, Nabila, Latypov, Azat, Hintersteiner, Jason, Sandstrom, Torbjorn, Bleeker, Arno, Cummings, Kevin D.
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p842-850, 9p