Zobrazeno 1 - 3
of 3
pro vyhledávání: '"C23C16/44"'
Autor:
Willson, C. Grant, Seshimo, Takehiro, Durand, William J., Ellison, Christopher John, Bates, Christopher M., Cushen, Julia, Santos, Logan J., Dean, Leon, Rausch, Erica L.
Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and infl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ee80784bf456930c70af57a5daa5e8b7
The invention relates to a device and method for the deposition of, in particular, crystalline layers on one or several, in particular, equally crystalline substrates in a process chamber (1), by means of reaction gases which are fed to the process c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=epopatstat__::6fc313bd299a983dcbaddffc6c1b678b
https://register.epo.org/application?number=EP0108105
https://register.epo.org/application?number=EP0108105