Zobrazeno 1 - 7
of 7
pro vyhledávání: '"C.B. Stell"'
Publikováno v:
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
In this paper, we present recent work on the fabrication and testing of a silicon bulk micromachined vacuum sensor. The fabrication process, electronics, and various modes of operation are described. The pressure sensitivity is demonstrated between 1
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::292fd07c66d2b14e2801fdd98dd18d28
https://doi.org/10.1109/sensor.1997.635749
https://doi.org/10.1109/sensor.1997.635749
Autor:
I. Charkaborty, J. Z. Wilcox, Roman C. Gutierrez, Tony K. Tang, Wen J. Li, V. Vorperian, R. Bartman, William J. Kaiser, R. Calvet, C.B. Stell
Publikováno v:
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::781cfa5297dd3451b9c4091676f0083e
https://doi.org/10.31438/trf.hh1996.65
https://doi.org/10.31438/trf.hh1996.65
Autor:
G.A. Arakaki, Roman C. Gutierrez, Tony K. Tang, K. Shcheglov, J. Z. Wilcox, William J. Kaiser, C.B. Stell, J.T. Rice, I. Chakraborty, Wen J. Li, V. Vorperian
In this paper, we present recent work on the design, fabrication, and packaging of a silicon Micro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba7da0c9a193b044f96181999baede31
https://zenodo.org/record/1275455
https://zenodo.org/record/1275455
Conference
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Akademický článek
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Publikováno v:
Journal of Geophysical Research. Planets; 1997, Vol. 102 Issue E2, p3989-4001, 13p
The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the