Zobrazeno 1 - 3
of 3
pro vyhledávání: '"C. W. ALMGREN"'
Autor:
Rudy Schlaf, A. N. Erickson, M. W. Nelson, Bruce A. Parkinson, P. G. Schroeder, C. W. Almgren
Publikováno v:
Applied Physics Letters. 74:1421-1423
Tapping-mode atomic force microscopy was used to spatially resolve areas of different doping types on Si wafers patterned by photolithography and subsequent ion implantation. Application of a direct current dc bias between cantilever and sample durin
Publikováno v:
Chemischer Informationsdienst. 12
Publikováno v:
Journal of the American Chemical Society. 103:2098-2099