Zobrazeno 1 - 2
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pro vyhledávání: '"C. Sughama"'
Publikováno v:
SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest.
This paper demonstrates a methodology for systematic calibration of models in process simulators and its impact on improvement of accuracy and predictive capability of a TCAD system. A software tool for calibration with numerical optimization has bee
Publikováno v:
2012 10th IEEE International Conference on Semiconductor Electronics (ICSE); 1/ 1/2012, p263-266, 4p