Zobrazeno 1 - 10
of 42
pro vyhledávání: '"C. Sudhama"'
Publikováno v:
Integrated Ferroelectrics. 7:319-328
The effects of the nonlinearity and polarization relaxation of storage capacitor on DRAM R/W operations are explained using a simple model and PSPICE simulation. For a given line-voltage design and pass device, the voltage signal and the READ/WRITE t
Publikováno v:
Journal of Electronic Materials. 23:1261-1268
In this paper, we present electrical and material properties of thin films (100 to 400 nm) of magnetron-sputtered ferroelectric PZT for memory applications. The optimal lead-compensation power (and the resulting film composition) is independent of fi
Publikováno v:
Integrated Ferroelectrics. 5:169-176
The effects of deposition temperature on the properties of thin films of sputtered lead-zirconate-titanate (PZT) have been studied for ULSI DRAM storage capacitor dielectric applications. The films were deposited by reactive dc magnetron sputtering f
Autor:
A. C. Campbell, Papu D. Maniar, C. J. Mogab, R. Moazzami, Jack C. Lee, Robert E. Jones, C. Sudhama
Publikováno v:
Journal of Applied Physics. 75:1014-1022
Time‐zero current‐voltage characteristics and time‐dependent current behavior of metal‐ferroelectric‐metal (Pt‐PZT‐Pt) capacitor structures have been studied. Under constant‐voltage stressing, the current density through the 1500‐A
Publikováno v:
Integrated Ferroelectrics. 3:113-120
A low thermal budget (with 550°C annealing) process with Ti-compensation for sputtered ferroelectric PZT thin films has been developed. PZT films with a composition near the morphotrophic phase boundary (Zr/Ti = 53/47) annealed at 550°C for 1 hr in
Publikováno v:
MRS Online Proceedings Library. 265:313-318
The origin and the effects of asymmetrical electrical behavior in sputtered PZT (Zr/Ti=65/35) thin film capacitors with Pt electrodes have been studied. The asymmetry and constriction in the P-E hysteresis loops are understood to result from differen
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:1562-1568
The fabrication of high dielectric constant lead zirconate titanate thin films for dynamic random access memory application involves post‐deposition annealing to convert the low dielectric constant pyrochlore phase to the desired high dielectric co
Publikováno v:
IEEE Electron Device Letters. 16:130-132
The effects of stress parameters (e,g,, stress magnitude, frequency, and pulse shape) on the loss of DRAM polarization during unipolar pulse stressing in sol-gel P(L)ZT thin film capacitors have been studied. The results indicate that there is a stro
Publikováno v:
IEEE Electron Device Letters. 15:126-128
Important aspects of nonlinear storage capacitor switching and their impact on DRAM READ/WRITE operations are explained using a simple model and PSpice simulation. The voltage signal and charge-transfer rate are found to be dependent not only on the
Autor:
R. Moazzami, P. Maniar, Rajesh Khamankar, Robert E. Jones, Junsung Lee, C.J. Mogab, C. Sudhama, Bo Jiang, Jiyoung Kim
Publikováno v:
Proceedings of 1994 VLSI Technology Symposium.
Very low leakage current density (5/spl times/10/sup -7/ A/cm/sup 2/ even at 125/spl deg/C) and high charge storage density (100 fCspl mu/m/sup 2/) under V/sub DD2=1 V conditions have been achieved using 5% La doped PZT films for gigabit DRAM capacit