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Autor:
C. P. J. Salzig, R. Jancke, Siegfried Selberherr, Jurgen Lorenz, Peter Evanschitzky, C. Kampen, E. Bär, Tanja Clees, U. Paschen
Publikováno v:
IEEE Transactions on Electron Devices. 58:2227-2234
Process variations increasingly challenge the manufacturability of advanced devices and the yield of integrated circuits. Technology computer-aided design (TCAD) has the potential to make key contributions to minimize this problem, by assessing the i