Zobrazeno 1 - 1
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pro vyhledávání: '"C. M. Mallouris"'
Publikováno v:
Journal of Applied Physics. 79:8735-8747
The gas kinetics of a 30 mTorr radio‐frequency methane glow discharge are studied as a function of methane depletion including conditions suitable for hard carbon thin‐film deposition. Mass spectrometry is used to measure the partial pressures of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2c7a6339ed5af2e78e44c27ed53f313
https://doi.org/10.1063/1.362500
https://doi.org/10.1063/1.362500
