Zobrazeno 1 - 7
of 7
pro vyhledávání: '"C. L. Roozeboom"'
Autor:
Yushi Yang, Beth L. Pruitt, Thomas W. Kenny, Matthew A. Hopcroft, Vu A. Hong, Eldwin J. Ng, C. L. Roozeboom, Chae Hyuck Ahn, Bridget E. Hill
Publikováno v:
Journal of Microelectromechanical Systems. 24:810-821
We present multifunctional integrated sensors (MFISES) that combine temperature, humidity, pressure, air speed, chemical gas, magnetic, and acceleration sensing on a single 2-mm $\times 2$ -mm die. We fabricate the MFISES in a wafer scale encapsulati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c6acf52a5b3b31fa4a6da4ab2fe32068
https://doi.org/10.1109/jmems.2014.2349894
https://doi.org/10.1109/jmems.2014.2349894
Autor:
D. A. Wickeraad, Joo Yong Sim, Beth L. Pruitt, C. L. Roozeboom, Matthew A. Hopcroft, Peter G. Hartwell, W. S. Smith
Publikováno v:
Journal of Microelectromechanical Systems. 22:779-793
We present the design, microfabrication, and characterization of ten sensors on one silicon die. We demonstrate simultaneous monitoring of multiple environmental parameters, including temperature, humidity, light intensity, pressure, wind speed, wind
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::db67289c299e56f86b709e460614d0ef
https://doi.org/10.1109/jmems.2013.2245400
https://doi.org/10.1109/jmems.2013.2245400
Autor:
Miriam B. Goodman, Bryan C. Petzold, Chloé Powell, C. L. Roozeboom, Pierre Ponce, Beth L. Pruitt, Sung-Jin Park
Publikováno v:
Biophysical Journal. 100:1977-1985
Body mechanics in the nematode Caenorhabditis elegans are central to both mechanosensation and locomotion. Previous work revealed that the mechanics of the outer shell, rather than internal hydrostatic pressure, dominates stiffness. This shell is com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::01c3a8eb58052e08f202da210a059f3c
https://doi.org/10.1016/j.bpj.2011.02.035
https://doi.org/10.1016/j.bpj.2011.02.035
Autor:
Chae Hyuck Ahn, Vu A. Hong, Yushi Yang, C. L. Roozeboom, B. E. Hill, Eldwin J. Ng, Beth L. Pruitt, Matthew A. Hopcroft
Publikováno v:
2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ff29d3c07cd06f24c8e0c8da0896b2ce
https://doi.org/10.31438/trf.hh2014.121
https://doi.org/10.31438/trf.hh2014.121
Autor:
Yushi Yang, Chae Hyuck Ahn, B. E. Hill, Vu A. Hong, C. L. Roozeboom, Matthew A. Hopcroft, Beth L. Pruitt, Eldwin J. Ng
Publikováno v:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).
We present multifunctional integrated sensors (abbreviated MFISES) that combine temperature, humidity, pressure, air speed, chemical gas, magnetic, and acceleration sensing on a single 2×2 mm chip. We fabricate MFISES in a wafer scale encapsulation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::107995e7968545a7733fbf1746bff67f
https://doi.org/10.1109/memsys.2014.6765755
https://doi.org/10.1109/memsys.2014.6765755
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
We present data and analysis of sensor cross-sensitivities to a range of environmental conditions: temperature, humidity, light intensity, air flow, magnetic field, and acceleration. We used previously developed multifunctional integrated sensors (MF
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::064273b45fc60a6dd3820f1b3a09206a
https://doi.org/10.1109/transducers.2013.6626693
https://doi.org/10.1109/transducers.2013.6626693
Autor:
R. S. Williams, Joo Yong Sim, B. Dura, D. A. Wickeraad, Matthew A. Hopcroft, C. L. Roozeboom, Peter G. Hartwell, W. S. Smith, Beth L. Pruitt
Publikováno v:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
We present multi-functional integrated sensors for the environment (MFISEs) combining ten sensor functions on a single silicon die. The purpose of the MFISEs chip is to monitor important environmental parameters such as temperature, humidity and air
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e5ecb836700d61f7fcf708b6f58faa7
https://doi.org/10.1109/memsys.2012.6170114
https://doi.org/10.1109/memsys.2012.6170114